Get current pricing for Lam Alliance, A-6 Lam Alliance A-6 Platform, (1) Lm/tm With Dual End Effector, (1) Wafer Pre-aligner, (2) 4526 Oxide Etch Modules With Esc Chucks & (1) 9400 Dsie Module . Product Category: Semiconductor, Sub Category: Etchers/ashers: