Get current pricing for Kla-tencor, 6420 Surfscan Kla 6420 Surfscan For Non-patterned Wafers, Capable Of 3 -8 Wafers, Low Angle Optics,standard Oem Puck,0.10 Micron Defect Sensitivity @ 95 . Product Category: Semiconductor, Sub Category: Metrology And Inspection: